The TMC13 Deposition Rate Controller from Henniker Scientific is a versatile, multi-channel device that has been designed for repeatebale, reliable and accurate control of film thickness and rate in vacuum based thin film deposition processes.
The feature-rich touch-screen interface can be easily customised to suit a particular operator preference and can be operated in both automatic and manual modes, providing a direct display and control of film thickness, deposition rate and frequency value for up to 6 independent deposition sources.
The device also includes shutter relays for each channel, two analogue inputs for connection of pressure gauges, and two re-transmission analogue outputs as standard, as well as an extensive and fully editable materials library.
Where control features are not required, the quartz crystal balance can be interfaced directly with a PC via the compact, low cost, single channel TM13 interface which provides a highly stable and repeatable frequency to rate/thickness conversion for all industry standard 6MHz quartz crystals.
