In recent weeks SoLayTec has shipped a number of systems. These systems includes a repeat order for modules (approx. 60MW) for an Asian customer, who is using an InPassion® ALD (60MW) since early this year. Further two InPassion® ALD systems were shipped. Both systems will be installed at solar cell manufacturers, already working with PECVD AlOx for several years.
The repeat order is coming from one of our Asian customers, who started cooperation in 2012 by using the InPassion® LAB tool from SoLayTec. Since April 2014 the customer started using the InPassion® ALD with 3 modules for deposition of Al2O3 for 1,800 wph in mass production. These first 3 ALD modules were successfully accepted in July providing the base to place the order for additional 3 modules.
“The other two customer are using PECVD AlOx for several years. Various comparison experiments between SoLayTec’s spatial ALD Al2O3 and PECVD AlOx at customers sites, have shown an absolute solar cell efficiency gain of about 0.3% for spatial ALD Al2O3 compared with PECVD AlOx for multi as well as mono crystalline silicon wafer material.” concludes Roger Görtzen, co-founder of SoLayTec and manager marketing and sales.
“Apart from the high layer quality, an important difference is that for the inline PECVD solution the anneal step can’t be combined. For our ALD solution the anneal can be easily combined with the SiNx capping step, when using a direct PECVD process. Or if a customer requests to use an inline PECVD process, the anneal process can be done in a separate annealing furnace,” comments Roger Görtzen.
“The “LAB-2-FAB” solution of SoLayTec has a strong benefit. InPassion® ALD can be scaled in throughput by adding deposition modules up to a number of 4, 6 or 8, delivering the maximum capacity. For your first pilot line this means you order the InPassion® ALD platform including gas cabinet, abatement and choose the right number of throughput. At a later stage you can add throughput by adding more modules, this enables you to lower your initial capital investment. So far already 3 of SoLayTec’s customers added the machine to full capacity,” adds Roger Görtzen.
This week RENA and SoLayTec will participate at the international European EUPVSEC 2014 in Amsterdam. During this event RENA and SoLayTec will present the results of their InPERC technology: Industrial production of multi crystalline solar cells with efficiencies above 18%.
SoLayTec is a spin-off company of the Dutch research organisation TNO and established in 2010. The company develops, delivers and services machines for atomic layer deposition (ALD) on solar cells worldwide. The SoLayTec ALD machines are designed for mass production in the solar market. In the field of solar cell ALD equipment, SoLayTec has a leading position.