Denton Vacuum LLC, a leading supplier of production scale thin film technology systems, shipped a specially configured Integrity® system for wafer-level IR filter development to a world-renowned German R & D organization. IR filters are a key element of the camera sensor technology in smartphones, digital cameras, automotive back-up cameras and many other consumer and industrial products. Because the filters are so critical to today’s electronics, multiple global companies and organizations are intensely engaged in enhancing IR filter functionality, reducing filter cost and integrating them into primary imaging sensors.

The cutting-edge e-beam evaporation system accelerates the customer’s development program in several ways. “First, it processes 200 mm wafers, facilitating work on production-scale product,” explains Rod Moore, president of Denton Vacuum. “Second, its integrated high-capacity, load-lock system enables rapid testing of alternate process recipes in a controlled vacuum environment. That means faster turnaround time on device characterization and analysis. Third, the system’s LambdaPro® optical monitor provides precise, real-time control of film properties during the deposition process. Finally, Denton’s ProcessPro® control software enables the research team to track even minute changes across the entire range of process parameters.” The system also features multiple evaporation sources and an ion source for ion assisted deposition (IAD).

Because leading global research organizations are demanding more from their equipment supply partners, Denton’s comprehensive program for this organization also included value-added services. Denton process engineers designed and demonstrated a series of initial wafer-level IR filter designs as part of the system qualification process. Additionally, Denton service engineers will lead installation and qualification at the customer site. “Our multi-faceted work with this influential organization illustrates that Denton has the innovative equipment and process technology solutions to help customers achieve new breakthroughs in thin film technology,” concludes Moore.

SOURCE: Denton Vacuum LLC