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Residual Gas Analysers for Vacuum Diagnostics and Leak Detection – RGA Series Quadrupole Mass Spectrometers

Hiden Analytical Limited 

Hiden RGA series quadrupole mass spectrometers for the examination of components present in a vessel or evolved from a process, featuring: – PPM Sensitivity, mass range to 300 amu, Remote (PC) or Local Control interface.- Stability (less than ±0.5% height variation over 24 h).- MASsoft control via RS232, USB or [...]


The Hiden HPR-30 Process Gas Analyser – for Vacuum Coating/Plasma Etching

Hiden Analytical Limited 

For the examination of all the components present in your chamber or evolved from your system:- CVD / PECVD / RIE / LPCVD / MOCVD- Vacuum Coating / Plasma Etching- Sputter Deposition- Contamination Studies- Base Pressure Fingerprint- Leak Detection / Virtual Leaks / desorption- Outgassing / Bakeout / Pump Performance- [...]


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