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High Pressure Residual Gas Analyser – HMT100-RC

Hiden Analytical Limited 

DUAL MODE RGA systems for Vacuum Diagnostics and Process Monitoring- Process Monitoring- RGA/ Leak Detection- Virtual Leaks / Desorption- Outgassing studies- Bakeout cycles- Pump Performance- Chamber / Process gas ContaminantsHiden HMT RGA quadrupole mass spectrometers a unique dual mode RGA system examination of components present in a vessel or evolved [...]


MC050: 2-inch mutli process reactor MOCVD, ALD, RTP & RTCVD


The Annealsys MC050 is a 2-inch CVD reactor with multi process capabilities including DLI-MOCVD, DLI-ALD, RTP and RTCVD. It has been especially developed to meet the requirements of research and development units and allows running several processes in sequence inside the same process chmaber.The DLI (direct liquid injection) vaporizer offers [...]


AS-Master 200 mm RTP system up to 1500°C


The AS-Master rapid thermal processor is a highly versatile tool allowing a wide range of processes from annealing to rapid thermal chemical vapor deposition. The high temperature version can run annealing processes up to 1500°C. Optional square chamber is available for square samples processing.The cold wall chamber technology provides high [...]


Spray CVD system: 2-inch aerosol CVD system


The Annealsys Spray-CVD-050 is a 2-inch Spray CVD (aerosol CVD) reactor especially developed to meet the requirements of research and development units. The infrared lamp heating system provides in-situ rapid thermal annealing process capability inside the deposition chamber. The system can be equipped with Kemstream Atokit for the precursor atomization [...]


AS-One: 4-inch and 6-inch RTP systems


4-inch (100 mm) and 6-inch (150 mm) wafer capability Floor standing system for reduced footprint From room temperature up to 1500°C High reliability and low cost of ownership Stainless steel cold wall chamber technology: High process reproducibility Ultra clean and contamination-free environment High cooling rates and low memory effect Pyrometer [...]


AS-Micro: 3-inch RTP system


Three-inch benchtop rapid thermal processorDedicated to research applications Sample size: few square millimeters up to 3-inch Optional 3-inch susceptor for 2-inch sample Quartz tube with stainless steel flanges process chamber Tubular infrared halogen lamps furnace Very fast ramp rates (> 250°C/s) Vacuum capability and optional turbo pump Horizontal motion door [...]


QCM Sensor Heads and Crystals from YTI

Yeagle Technology Inc 

YTI offers both digital and analog quartz crystal sensor heads. The sensor heads are compatible with all Sloan and Kronos crystals and crystal monitors. The sensor heads are machined stainless steel with a 1/8 ” water channel for cooling lines. The quick change crystal holder eliminates the need for special [...]


INTELLITROL Series of Automatic Valve Controllers – AVC100

Yeagle Technology Inc 

The INTELLITROL Series of Automatic Valve Controllers provide total control of all basic vacuum operations. The microprocessor based controller provides reliable one button operation for fully automatic valve sequencing, protected manual mode to prevent mis-valving during manual operations, and service mode for complete manual operation. The intelligent layout of the [...]


SIMS Workstation , a UHV Surface Analysis System, for thin film depth profiling

Hiden Analytical Limited 

A rugged general purpose SIMS and SNMS analysis station:- Rapid turnaround of all types of samples- Static and dynamic SIMS- Integral ioniser for SNMS and RGA- Choice of Ion guns- SNMS surface mapping / imaging- Surface contamination analysis- Quantification of matrix level by SNMS- Flexible and upgradeable configuration- Low cost [...]


EQS, a Secondary Ion Mass Spectrometer bolt on SIMS Analyser

Hiden Analytical Limited 

State of the art, bolt-on SIMS probe for integration into your existing UHV surface science chamber. Applications Include: – Static / Dynamic SIMS with energy analysis- Integral front end ioniser for RGA- Composition / contamination analysis- Depth profiling- Leak detection and desorbed gas analysis- Compatible with Hiden SIMS Workstation- Suitable [...]


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