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Kurt J Lesker: Evaporation Sources

Kurt J. Lesker Company 

For us, the title Evaporation Sources cover products as divergent as resistance heated boats, laser ablation target carrousels, crucibles for electron beam sources, indirectly heated effusion cells, and low temperature evaporation sources specifically design for OLED / PLED coating applications in flat panel display manufacturing. For your convenience we stock [...]

 

Kurt J Lesker: Sample Manipulation & Motion

Kurt J. Lesker Company 

Many different devices are associated with sample manipulation: motion feedthroughs, sample transfer, translation devices, xyz manipulation, z-only manipulation, sample rotation, rotary drives, linear drives, wobble sticks, etc. All cover different aspects of the same basic requirement—to mechanically move an object that is inside a vacuum chamber and under vacuum. Such [...]

 

Kurt J Lesker: Pressure Measurement

Kurt J. Lesker Company 

We offer all the popular vacuum gauges and gauge controllers: convection; thermocouple (T/C); Pirani; diaphragm & capacitance manometers; hot and cold cathode gauges; leak detectors; and all the ancillary inlet systems, replacement parts, and filaments our customers require. Most items can be purchased on-line, even those with a complex option [...]

 

Kurt J Lesker: Fluids & Greases

Kurt J. Lesker Company 

For almost 40 years we have manufactured hydrocarbon vacuum fluids of all grades and viscosities. Recently we introduced our new semi-synthetic hydrocarbon oil which offers superior performance with excellent chemical stability. KJLSS oil contains an anti-oxidation additive which extends the useful life of the oil. With its low vapor pressure [...]

 

Kurt J Lesker: Feedthroughs

Kurt J. Lesker Company 

We make over 1,200 different electrical feedthroughs in a wide variety of terminations, maximum voltages, and current carrying capacities.To help your selection, we list a cross-reference table that gives the part number of two OEMs followed by the equivalent KJLC part number.We also offer: viewports, rotary motion drives, linear positioners, [...]

 

MC050: 2-inch mutli process reactor MOCVD, ALD, RTP & RTCVD

ANNEALSYS 

The Annealsys MC050 is a 2-inch CVD reactor with multi process capabilities including DLI-MOCVD, DLI-ALD, RTP and RTCVD. It has been especially developed to meet the requirements of research and development units and allows running several processes in sequence inside the same process chmaber.The DLI (direct liquid injection) vaporizer offers [...]

 

AS-Master 200 mm RTP system up to 1500°C

ANNEALSYS 

The AS-Master rapid thermal processor is a highly versatile tool allowing a wide range of processes from annealing to rapid thermal chemical vapor deposition. The high temperature version can run annealing processes up to 1500°C. Optional square chamber is available for square samples processing.The cold wall chamber technology provides high [...]

 

Spray CVD system: 2-inch aerosol CVD system

ANNEALSYS 

The Annealsys Spray-CVD-050 is a 2-inch Spray CVD (aerosol CVD) reactor especially developed to meet the requirements of research and development units. The infrared lamp heating system provides in-situ rapid thermal annealing process capability inside the deposition chamber. The system can be equipped with Kemstream Atokit for the precursor atomization [...]

 

AS-One: 4-inch and 6-inch RTP systems

ANNEALSYS 

4-inch (100 mm) and 6-inch (150 mm) wafer capability Floor standing system for reduced footprint From room temperature up to 1500°C High reliability and low cost of ownership Stainless steel cold wall chamber technology: High process reproducibility Ultra clean and contamination-free environment High cooling rates and low memory effect Pyrometer [...]

 
 

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