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AS-One: 4-inch and 6-inch RTP systems

4-inch (100 mm) and 6-inch (150 mm) wafer capability
Floor standing system for reduced footprint
From room temperature up to 1500°C
High reliability and low cost of ownership

Stainless steel cold wall chamber technology:
High process reproducibility
Ultra clean and contamination-free environment
High cooling rates and low memory effect

Pyrometer and thermocouple temperature control
Fast digital PID temperature controller

Edge pyrometer viewport insures enhanced temperature control of the susceptor for compound semiconductors and small samples.

High vacuum version (10-6 mbar) is available
Outstanding worldwide customer support

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Posted by: ANNEALSYS 

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