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AS-Micro: 3-inch RTP system – Vacuum Coating .info – VCi
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AS-Micro: 3-inch RTP system

Three-inch benchtop rapid thermal processor
Dedicated to research applications

Sample size: few square millimeters up to 3-inch
Optional 3-inch susceptor for 2-inch sample
Quartz tube with stainless steel flanges process chamber
Tubular infrared halogen lamps furnace
Very fast ramp rates (> 250°C/s)
Vacuum capability and optional turbo pump
Horizontal motion door with quartz tray for easy loading and unloading of the wafers and thermocouple installation.
Thermocouple temperature measurement and the fast digital PID temperature controller assure high and stable temperature control across the temperature range.
Optional pyrometer control.
Optional twin chamber to manage cross-contamination
The system is provided with full PC control with Windows compatible software.

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Posted by: ANNEALSYS 
 

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