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Alicat Mass Flow Controllers for Vacuum Applications at Intersolar

Tucson, Arizona (June 10, 2013) – Alicat Scientific, Inc., will exhibit its MCV series mass flow controller during Intersolar North America, July 9-11, 2013 at the Moscone Center (San Francisco, Calif.). Used by photovoltaic cell manufacturers to prevent target poisoning in vacuum deposition processes, Alicat’s instruments provide the tight shut-off parameters required to maintain product integrity.

The Alicat MCV accurately controls gas flow rates as low as 0.5 sccm or as high as 20 slpm with response times of 50 to 100 milliseconds. Its integrated positive shut-off valve provides leak-tight shut-off of 1×10-9 atm-scc/s Helium max, preventing contamination of the coating process when no gas is flowing. The MCV’s 200:1 turndown ratio allows manufacturers to cover a wider flow range with fewer pieces of instrumentation. At 1.5 inches deep and weighing just 3 pounds, the space-efficient MCV integrates easily into PV coating systems.

Also on display at Alicat’s booth will be its MS and MCS series of mass flow controllers for corrosive gases, now with compatibility for silane (SiH4) and up to six other aggressive gases. The all-316L stainless steel construction and FFKM elastomeric materials of the MS and MCS series provide metering and control options for the more common corrosive gases and gas mixes used in photovoltaic and semiconductor coatings applications.
All Alicat instruments are based on its highly accurate laminar flow technology, come pre-calibrated for 30 gases and gas mixes, and are backed by the industry’s only lifetime warranty.

To learn more about Alicat’s MCV for vacuum applications, visit Alicat at Intersolar booth 8533. Outside the show, visit, or call +1 520 290-6060.

Part of the international Halma group, Alicat Scientific designs and manufactures mass flow devices used in medical and scientific instrumentation, as well as specialty industrial applications, for high-precision measurement of gas and liquid flows. Its all-digital product range includes mass and liquid flow meters and controllers; pressure gauges and controllers; portable flow meters; calibration standards; software and accessories.


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Posted by: Halma plc 
June 10th, 2013 at 19:21

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